Ion Implantation and Semiconductor Processing Links of interest
A Guide to Semiconductor Substrates (from Brigham Young University)
http://www.ee.byu.edu/cleanroom/everything_wafers.phtml?everything_wafers-see-all=true
Periodic Table with supplemental information
http://www.chemicalelements.com/show/name.html
Properties of Silicon and Silicon Wafers – a comprehensive guide
http://www.el-cat.com/silicon_properties.htm
Spreading Resistance Analysis (SRA) – sometimes called Spreading Resistance Probe. A useful metrology tool for determining the profile of activated implant dopants.
http://www.solecon.com/
