================================================================== Calculation using SRIM-2003 SRIM version ---> SRIM-2003.20 Calc. date ---> July 21, 2004 ================================================================== Ion = Phosphorus [15] , Mass = 30.974 amu Target Density = 2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3 ======= Target Composition ======== Atom Atom Atomic Mass Name Numb Percent Percent ---- ---- ------- ------- Si 14 100.00 100.00 ==================================== Bragg Correction = 0.00% Stopping Units = MeV / (mg/cm2) See bottom of Table for other Stopping units Ion dE/dx dE/dx Projected Longitudinal Lateral Energy Elec. Nuclear Range Straggling Straggling ----------- ---------- ---------- ---------- ---------- ---------- 10.00 keV 3.902E-01 1.868E+00 169 A 83 A 60 A 11.00 keV 4.092E-01 1.881E+00 182 A 88 A 64 A 12.00 keV 4.274E-01 1.890E+00 195 A 94 A 68 A 13.00 keV 4.449E-01 1.897E+00 209 A 99 A 72 A 14.00 keV 4.617E-01 1.901E+00 222 A 105 A 76 A 15.00 keV 4.779E-01 1.904E+00 235 A 110 A 80 A 16.00 keV 4.936E-01 1.905E+00 248 A 115 A 84 A 17.00 keV 5.087E-01 1.905E+00 261 A 121 A 87 A 18.00 keV 5.235E-01 1.904E+00 274 A 126 A 91 A 20.00 keV 5.518E-01 1.899E+00 300 A 136 A 98 A 22.50 keV 5.853E-01 1.889E+00 332 A 149 A 107 A 25.00 keV 6.169E-01 1.877E+00 364 A 161 A 116 A 27.50 keV 6.471E-01 1.862E+00 396 A 173 A 124 A 30.00 keV 6.758E-01 1.846E+00 429 A 185 A 133 A 32.50 keV 7.034E-01 1.829E+00 461 A 197 A 141 A 35.00 keV 7.300E-01 1.811E+00 494 A 209 A 150 A 37.50 keV 7.556E-01 1.793E+00 526 A 221 A 158 A 40.00 keV 7.804E-01 1.775E+00 559 A 232 A 166 A 45.00 keV 8.277E-01 1.739E+00 624 A 255 A 182 A 50.00 keV 8.725E-01 1.703E+00 690 A 277 A 198 A 55.00 keV 9.151E-01 1.667E+00 756 A 298 A 214 A 60.00 keV 9.558E-01 1.633E+00 822 A 320 A 230 A 65.00 keV 1.010E+00 1.601E+00 888 A 341 A 245 A 70.00 keV 1.073E+00 1.569E+00 954 A 361 A 261 A 80.00 keV 1.188E+00 1.509E+00 1084 A 399 A 292 A 90.00 keV 1.289E+00 1.454E+00 1213 A 435 A 322 A 100.00 keV 1.376E+00 1.403E+00 1342 A 470 A 351 A 110.00 keV 1.453E+00 1.356E+00 1470 A 503 A 380 A 120.00 keV 1.521E+00 1.313E+00 1597 A 536 A 408 A 130.00 keV 1.583E+00 1.272E+00 1725 A 567 A 435 A 140.00 keV 1.640E+00 1.235E+00 1852 A 597 A 462 A 150.00 keV 1.693E+00 1.200E+00 1979 A 626 A 489 A 160.00 keV 1.743E+00 1.167E+00 2106 A 654 A 515 A 170.00 keV 1.789E+00 1.136E+00 2232 A 682 A 540 A 180.00 keV 1.833E+00 1.107E+00 2359 A 709 A 565 A 200.00 keV 1.914E+00 1.054E+00 2612 A 761 A 615 A 225.00 keV 2.008E+00 9.960E-01 2928 A 823 A 674 A 250.00 keV 2.096E+00 9.448E-01 3242 A 882 A 732 A 275.00 keV 2.182E+00 8.994E-01 3554 A 937 A 789 A 300.00 keV 2.267E+00 8.589E-01 3864 A 989 A 843 A 325.00 keV 2.351E+00 8.224E-01 4171 A 1039 A 896 A 350.00 keV 2.437E+00 7.894E-01 4474 A 1086 A 947 A 375.00 keV 2.522E+00 7.593E-01 4774 A 1130 A 997 A 400.00 keV 2.609E+00 7.318E-01 5069 A 1172 A 1045 A 450.00 keV 2.785E+00 6.833E-01 5647 A 1251 A 1137 A 500.00 keV 2.964E+00 6.416E-01 6207 A 1321 A 1223 A