==================================================================
              Calculation using SRIM-2003 
              SRIM version ---> SRIM-2003.20
              Calc. date   ---> July 19, 2004 
 ==================================================================

 Disk File Name = SRIM Outputs\Fluorine in Silicon

 Ion = Fluorine [9] , Mass = 18.998 amu

 Target Density =  2.3212E+00 g/cm3 = 4.9770E+22 atoms/cm3
 ======= Target  Composition ========
    Atom   Atom   Atomic    Mass     
    Name   Numb   Percent   Percent  
    ----   ----   -------   -------  
     Si     14    100.00    100.00   
 ====================================
 Bragg Correction = 0.00%
 Stopping Units =  MeV / (mg/cm2) 
 See bottom of Table for other Stopping units 

   Ion        dE/dx      dE/dx     Projected  Longitudinal   Lateral
  Energy      Elec.      Nuclear     Range     Straggling   Straggling
-----------  ---------- ---------- ----------  ----------  ----------
  10.00 keV   3.506E-01  9.245E-01     249 A       138 A        99 A   
  11.00 keV   3.677E-01  9.192E-01     271 A       148 A       106 A   
  12.00 keV   3.841E-01  9.131E-01     293 A       159 A       114 A   
  13.00 keV   3.998E-01  9.064E-01     315 A       169 A       121 A   
  14.00 keV   4.148E-01  8.992E-01     337 A       179 A       128 A   
  15.00 keV   4.294E-01  8.917E-01     359 A       189 A       135 A   
  16.00 keV   4.435E-01  8.840E-01     381 A       199 A       142 A   
  17.00 keV   4.571E-01  8.762E-01     404 A       208 A       149 A   
  18.00 keV   4.704E-01  8.684E-01     426 A       218 A       156 A   
  20.00 keV   4.958E-01  8.526E-01     471 A       237 A       170 A   
  22.50 keV   5.259E-01  8.331E-01     527 A       259 A       187 A   
  25.00 keV   5.544E-01  8.141E-01     583 A       282 A       203 A   
  27.50 keV   5.814E-01  7.957E-01     640 A       304 A       220 A   
  30.00 keV   6.073E-01  7.780E-01     696 A       325 A       236 A   
  32.50 keV   6.321E-01  7.611E-01     753 A       346 A       252 A   
  35.00 keV   6.559E-01  7.449E-01     810 A       367 A       268 A   
  37.50 keV   6.789E-01  7.294E-01     868 A       387 A       284 A   
  40.00 keV   7.565E-01  7.146E-01     924 A       406 A       300 A   
  45.00 keV   8.877E-01  6.869E-01    1030 A       440 A       331 A   
  50.00 keV   9.672E-01  6.615E-01    1133 A       471 A       361 A   
  55.00 keV   1.015E+00  6.382E-01    1235 A       500 A       389 A   
  60.00 keV   1.043E+00  6.167E-01    1337 A       529 A       416 A   
  65.00 keV   1.062E+00  5.968E-01    1440 A       557 A       441 A   
  70.00 keV   1.076E+00  5.784E-01    1544 A       585 A       467 A   
  80.00 keV   1.101E+00  5.453E-01    1756 A       640 A       515 A   
  90.00 keV   1.129E+00  5.163E-01    1971 A       693 A       563 A   
 100.00 keV   1.164E+00  4.908E-01    2188 A       744 A       610 A   
 110.00 keV   1.205E+00  4.681E-01    2406 A       793 A       656 A   
 120.00 keV   1.251E+00  4.477E-01    2622 A       840 A       701 A   
 130.00 keV   1.300E+00  4.293E-01    2836 A       884 A       745 A   
 140.00 keV   1.352E+00  4.126E-01    3048 A       925 A       788 A   
 150.00 keV   1.406E+00  3.973E-01    3256 A       964 A       830 A   
 160.00 keV   1.461E+00  3.833E-01    3461 A      1001 A       871 A   
 170.00 keV   1.517E+00  3.705E-01    3662 A      1036 A       910 A   
 180.00 keV   1.573E+00  3.586E-01    3860 A      1069 A       948 A   
 200.00 keV   1.685E+00  3.372E-01    4245 A      1130 A      1020 A   
-----------------------------------------------------------
 Multiply Stopping by        for Stopping Units
 -------------------        ------------------
  2.3211E+01                 eV / Angstrom 
  2.3211E+02                keV / micron   
  2.3211E+02                MeV / mm       
  1.0000E+00                keV / (ug/cm2) 
  1.0000E+00                MeV / (mg/cm2) 
  1.0000E+03                keV / (mg/cm2) 
  4.6637E+01                 eV / (1E15 atoms/cm2)
  3.4514E-01                L.S.S. reduced units
 ==================================================================
 (C) 1984,1989,1992,1998,2003 by J.P. Biersack and J.F. Ziegler