The Krytek 300 Ion Source Conditioner offers one-step conditioning and testing to improve implanter performance and save valuable implanter time. The only system that simulates and conditions an ion source off-line as if it were in an implanter, the Krytek 300 reduces implanter time required to bring up a source following exchange by one to two hours. A single Krytek 300 can condition and test ion sources after every rebuild, off-line, for up to 10 implanters in your fab. The system supports ion sources and ion beam components from all implanter manufacturers. Payback can be expected in ~125 source changes. With over 125 systems installed globally, the Krytek source conditioner has a proven track record of saving time and money. |